发明名称 |
Mems reflectors having tail portions that extend inside a recess and head portions that extend outside the recess and methods of forming same |
摘要 |
A MEMs structure can include a recess in a substrate, the recess having a side wall and a floor. A tail portion of a moveable reflector is on the substrate and extends beyond the side wall of the recess opposite the recess floor and is configured to rotate into the recess. A head portion of the moveable reflector extends on the substrate outside the recess.
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申请公布号 |
US2002171909(A1) |
申请公布日期 |
2002.11.21 |
申请号 |
US20020151080 |
申请日期 |
2002.05.20 |
申请人 |
WOOD ROBERT L.;AGRAWAL VIVEK |
发明人 |
WOOD ROBERT L.;AGRAWAL VIVEK |
分类号 |
B81B3/00;G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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