Jet-induced finishing of a substrate surface

摘要

Jet-induced finishing of a substrate surface includes means for covering the surface with an abrasive liquid slurry and means for impinging a jet of fluid, either a gas or a liquid, against the slurry to create a high-shear work zone on the substrate surface whereby portions of the substrate are lifted and removed to alter the shape of the surface towards a predetermined shape and/or smoothness. The surface may be covered as by cascading a flowing layer of slurry over it or by impinging slurry onto the work zone or by immersing the substrate in a pool of the slurry. A nozzle for dispensing the jet fluid is precisely located at a predetermined distance and angle from the surface to be finished. A coarse removal function is provided by disposing the nozzle tip at a first distance from the substrate surface, and a fine removal function is provided by disposing the nozzle closer to the substrate surface. The invention is generally useful for finishing optical elements, and especially for inexpensive forming of microlenses.