Two-step flourinated-borophosophosilicate glass deposition process

摘要

A method for depositing a layer over a substrate includes depositing a first halogen-doped borophosphosilicate glass (BPSG) layer over said substrate at a first pressure level. A second halogen-doped BPSG layer is deposited over said first layer at a second pressure level, wherein said first pressure level is higher than said second pressure level.