SILICON OXIDE MEMBRANE

摘要

A silicon oxide membrane formed on a surface of a plastic substrate,characterized in that methyl groups and methylene groups are present in the vicinity of its side of the interface between the membrane and the plastic substrate.The silicon oxide membrane not only is excellent in the adhesion to a plastic substrate,and in softness and flexibility,but also exhibits excellent gas barrier properties,which leads to the achievement of satisfactory gas barrier property with a less thickness as compared to that of a conventional silicon oxide membrane.Further,the above membrane can be produced with excellent productivity.