Acquiring geometric and optical properties of the different layers of a layer system comprises using a measuring device and measuring methods for acquiring the properties of one of the layers

摘要

Acquiring geometric and optical properties of the different layers of a layer system comprises using a measuring device and measuring methods for acquiring the properties of one of the layers depending on the optical properties of this layer and depending on the optical properties of the opposite lying layer in the measuring direction. An Independent claim is also included for a measuring device for acquiring geometric and optical properties of the different layers of a layer system comprising an illuminating unit (4) having radiation sources covering the UV, Visible and IR regions and detectors for each of the wavelength regions. Preferred Features: The detectors used are a UV-Visible spectral photometer (8) and a NIR spectral photometer (9).