METHOD AND DEVICE FOR LASER BEAM MACHINING OF LAMINATED MATERIAL

摘要

A method for laser beam machining of a laminated material capable of machining a laminated material (1) comprising one or more conductive layers (4, 6) and an insulating layer (2) laminated each other by a laser beam (20), comprising the steps of radiating the laser beam (20) to the laminated material to form a hole (22) for machining the conductive layer (4) and radiating the laser beam smaller in beam diameter at a machining point than the laser beam radiated to the conductive layer (4) into the hole (22) to machine the insulating layer (2) laminated on the conductive layers (4, 6).