MICROLITHOGRAPIC PROJECTION ILLUMINATION SYSTEM, OPTICAL SYSTEM, METHOD FOR THE PRODUCTION OF A MICROLITHOGRAPHIC PROJECTION LENS SYSTEM AND MICROLITHOGRAPHIC STRUCTURING METHOD

摘要

The injection relates to a projection illumination system, especially one with 157 or 193 nm and an image-side NA of 0.8 0.95, comprising fluoride crystal lenses (43, 43), wherein the negative effect of the angle-dependent birefringence thereof is reduced by relative rotation around the optical axis (O) and/or by a correction element (44) close to a plane of the pupil (P).