发明名称 Table system with angular position controls
摘要 A table system with angular position control means is disclosed in which an object supported on a table can be moved accurately over a tiny angle in circular direction to any desired position. The table is supported on a bed for rotation through a crossed-roller bearing. Position control means gets the table to turn over a tiny angle through an arm plate fastened to the table. A nut and screw set, when driven by a motor, causes a linear motion that is in line with a tangent of the table, and the linear motion is translated into a circular motion to turn the table in any circular direction by virtue of a combination of a first linear motion guide unit interposed between the bed and a carriage to control the linear motion in the tangential direction, a second bearing means interposed between the carriage and a turret means, and a second linear motion guide unit to control a linear motion in the direction that looks towards the center of the table.
申请公布号 US2002170188(A1) 申请公布日期 2002.11.21
申请号 US20020141958 申请日期 2002.05.10
申请人 NIPPON THOMPSON CO., LTD. 发明人 KATO MASATAKA
分类号 G12B5/00;B23Q1/00;B23Q1/40;B23Q1/52;B23Q16/02;F16C19/36;F16C33/58;H01L21/68;(IPC1-7):G01D21/00 主分类号 G12B5/00
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