发明名称 USE OF PARTIALLY FLUORINATED POLYMERS IN APPLICATIONS REQUIRING TRANSPARENCY IN THE ULTRAVIOLET AND VACUUM ULTRAVIOLET
摘要 Disclosed are partially fluorinated that are substantially transparent to ultraviolet radiation at wavelengths from approximately 150 nanometer to 260 nanometers.
申请公布号 WO02093261(A1) 申请公布日期 2002.11.21
申请号 WO2002US18392 申请日期 2002.05.14
申请人 E.I. DU PONT DE NEMOURS AND COMPANY;FRENCH, ROGER, HARQUAIL;WHELAND, ROBERT, CLAYTON;QIU, WEIMING 发明人 FRENCH, ROGER, HARQUAIL;WHELAND, ROBERT, CLAYTON;QIU, WEIMING
分类号 C08J7/00;C09J127/12;G02B1/04;G02B5/00;G03C5/04;G03F1/62;G03F7/004;H01L21/027 主分类号 C08J7/00
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