发明名称 Method of forming a capacitor
摘要 A capacitor including a first electrode selected from a group consisting of transition metals, conductive metal-oxides, alloys thereof, and combinations thereof. The capacitor also includes a second electrode and a dielectric between the first and second electrodes. The present invention may be used to form devices, such as memory devices and processors. The present invention also includes a method of making a capacitor. The method includes forming a first electrode selected from a group consisting of transition metals, conductive metal-oxides, and alloys thereof. The method also includes forming a second electrode and forming a dielectric between the first and second electrodes.
申请公布号 US2002173112(A1) 申请公布日期 2002.11.21
申请号 US20020159695 申请日期 2002.05.30
申请人 发明人 GEALY F. DANIEL;GRAETTINGER THOMAS M.
分类号 H01L21/02;(IPC1-7):H01L21/824;H01L29/76 主分类号 H01L21/02
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