| 发明名称 |
Method for tracking the state of a MEMS optical switch using magnetic sensor detection |
| 摘要 |
A method for tracking the ON/OFF state of a 2D MEMS optical switch is based on comparing the output property of a magnetic sensor deployed on a micro machined optical element with fixed values predetermined by the property the sensor when said element is known to be in the ON and OFF states.
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| 申请公布号 |
US2002171420(A1) |
申请公布日期 |
2002.11.21 |
| 申请号 |
US20010853869 |
申请日期 |
2001.05.11 |
| 申请人 |
CHAPARALA MURALI;ZALEWSKI GARY |
发明人 |
CHAPARALA MURALI;ZALEWSKI GARY |
| 分类号 |
G02B26/08;(IPC1-7):G01R33/025;G01R33/00;G06F19/00 |
主分类号 |
G02B26/08 |
| 代理机构 |
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