发明名称 |
FLUID FLOW SYSTEM |
摘要 |
<p>The present application relates to fluid flow systems and more particularly to fluid flow systems for use in the semiconductor industry. In one embodiment, the present invention is directed to a fluid stick(10) adapted to be mounted to a mounting surface(20). The fluid stick includes a first flow component(30) positioned in the fluid stick(10) and a second flow component(40) positioned in the fluid stick(10) between the first flow component(30) and the mounting surface(20) and in fluid connection with the first flow component(30).</p> |
申请公布号 |
WO02093053(A1) |
申请公布日期 |
2002.11.21 |
申请号 |
WO2002US15474 |
申请日期 |
2002.05.16 |
申请人 |
UNIT INSTRUMENTS, INC.;VU, KIM, NGOC |
发明人 |
VU, KIM, NGOC |
分类号 |
F16K27/00;(IPC1-7):F16K27/00 |
主分类号 |
F16K27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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