发明名称 FLUID FLOW SYSTEM
摘要 <p>The present application relates to fluid flow systems and more particularly to fluid flow systems for use in the semiconductor industry. In one embodiment, the present invention is directed to a fluid stick(10) adapted to be mounted to a mounting surface(20). The fluid stick includes a first flow component(30) positioned in the fluid stick(10) and a second flow component(40) positioned in the fluid stick(10) between the first flow component(30) and the mounting surface(20) and in fluid connection with the first flow component(30).</p>
申请公布号 WO02093053(A1) 申请公布日期 2002.11.21
申请号 WO2002US15474 申请日期 2002.05.16
申请人 UNIT INSTRUMENTS, INC.;VU, KIM, NGOC 发明人 VU, KIM, NGOC
分类号 F16K27/00;(IPC1-7):F16K27/00 主分类号 F16K27/00
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