发明名称 IMPROVED FAN FOR GAS DISCHARGE LASER
摘要 An electric discharge laser apparatus having a laser chamber containing a laser gas and two longitudinal electrodes defining a discharge region for producing electrical discharges, and a tangential fan for circulating the laser gas. The fan has blade members and hub members (12) configured to minimize adverse effects of reflections of electric discharge generated shock waves back to the discharge region simultaneously with a subsequent discharge.
申请公布号 WO02093703(A1) 申请公布日期 2002.11.21
申请号 WO2002US12417 申请日期 2002.04.18
申请人 CYMER, INC.;PARTLO, WILLIAM, N.;RETTIG, CURTIS, L. 发明人 PARTLO, WILLIAM, N.;RETTIG, CURTIS, L.
分类号 F04D17/04;F04D29/28;F04D29/66;G03F7/20;H01S3/036;H01S3/038;H01S3/04;H01S3/041;H01S3/08;H01S3/097;H01S3/0971;H01S3/0975;H01S3/102;H01S3/104;H01S3/105;H01S3/11;H01S3/13;H01S3/139;H01S3/22;H01S3/223;H01S3/225;(IPC1-7):H01S3/22 主分类号 F04D17/04
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