CARBON NANOBIMORPH ACTUATOR AND SENSOR

摘要

A nanomechanical actuator/oscillator system (10) comprises a substrate (12) having a first electrode (14) and a second electrode (16) and a nanobimorph (18) which includes first and second self-assembled nanotubes (20, 22). System (10) is designed such that inducing a difference in charge density between the nanotubes (20, 22), e.g. by biasing tube (22) positive with the respect to the other tube (20) with sufficient tube to tube contact resistance, induces lateral movement in the end of naonbimorph (18), forming a nanoscale resonator, as well as a force sensor when operated in an inverse mode. A method of producing a novel nanobimorph structure with integrated electrodes is also provided.