ACTUATING AND SENSING DEVICE FOR SCANNING PROBE MICROSCOPES

摘要

The invention relates to an actuating and sensing device for scanning probe microscopes. The actuating and sensing device includes a tuning fork (21) containing two prongs, connection means (23), e.g. a spring means, and a probing tip (22). The tip (22) is connected to both prongs of the tuning fork (21) with said connection means (23). The tuning fork (21) is used as a mechanical resonator to vibrate. The movements of the prongs are transformed via the connection means (23) into movements of the tip (22) wherein the tip movements can be in different planes than the movement plane of the prongs.