METHOD OF REDUCING SPUTTERING BURN-IN TIME, MINIMIZING SPUTTERED PARTICULATE, AND TARGET ASSEMBLY THEREFOR,申请号EP19980918931-传众专利搜索

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发明名称	METHOD OF REDUCING SPUTTERING BURN-IN TIME, MINIMIZING SPUTTERED PARTICULATE, AND TARGET ASSEMBLY THEREFOR
摘要
申请公布号	EP0977905(A4)	申请公布日期	2002.11.20
申请号	EP19980918931	申请日期	1998.05.04
申请人	INTEL CORPORATION;MATERIALS RESEARCH CORPORATION	发明人	DUNLOP, JOHN, A.;GOLDSTEIN, MICHAEL;FELDEWERTH, GERALD, B.;SHIM, CARI;SCHITTNY, STEPHAN
分类号	C23C14/34;(IPC1-7):C23C14/34;B08B3/12;B44C1/22;C25F3/00	主分类号	C23C14/34
代理机构		代理人
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