Evacuatable package and a method of producing the same

摘要

The present invention is an evacuatable package structure with highly reliable vacuum-sealing and a method for producing the same. A lid portion (2) is joined onto a substrate (1) so that an element (4) is accommodated in a space (3) formed by the substrate (1) and the lid portion (2). A connecting hole (5) connecting to the space (3) is made in the lid portion (2) such that it opens to the top face of the lid portion (2). A metal film (10) is formed in the complete peripheral region of the opening of the connecting hole (5), and a thermo-melting material (8) is joined to the metal film (10) to close the opening of the connecting hole (5) with the thermo-melting material (8) so as to seal the element (4) in the vacuum space (3). Before closing the opening of the connecting hole (5) with the thermo-melting material (8), the space (3) is evacuated, and simultaneously, the thermo-melting material (8) is melted by heat and left until completely degassed in a vacuum. The degassed thermo-melting material (8) is then pressed and joined to the metal film (10) in the periphery of the opening of the connecting hole (5) to close the opening with the thermo-melting material (8) and vacuum-seal the space (3).