METHOD OF ION DOPING OF SOLID BODIES

摘要

FIELD: doping of solid bodies by radiation treatment of phase-forming elements with ions; ion modification of structure and physico-mechanical properties of metals, semiconductors and superconductors. SUBSTANCE: method consists in simultaneous or successive radiation treatment of objects with ions of inert gas and ions of phase-forming elements; radiation treatment with inert gas ions leads to forming gas nanopores at simultaneous or successive filling of these pores with ions of phase- forming elements. EFFECT: enhanced efficiency; forming and synthesizing mono-dispersed nanoemissions of various phases at high volume density. 4 dwg