| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiator for generating electron beam over a large area by low voltage, and a gas treatment apparatus for decomposing gas by non-equilibrium plasma generated using the same. SOLUTION: The electron beam irradiator emits electrons by applying voltage across two electrodes 2 and 8 opposed to each other. Nano-tubers 19 are arranged to at least one of the opposed surfaces of the electrodes 2 and 8, and a protective film 15 having electron transmission characteristics is provided to the back surface of the electrode 2 opposed to the electrode 8 to which the nano-tubes 19 are arranged and electron beam 13 transmits through the protective film 15 to be emitted. The gas treatment apparatus is equipped with the electron beam irradiator and gas 5 to be decomposed is decomposed by the non-equilibrium plasma 3 generated by the electron beam 13. |
