发明名称 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
摘要 In order to form a first capacitor having a small capacitance and a second c apacitor having a large capacitance on a substance with a minimum number of manufactu ring steps, at least one of electrodes of the first capacitor and at least one of electr odes of the second capacitor are formed simultaneously.
申请公布号 CA2252875(C) 申请公布日期 2002.11.19
申请号 CA19982252875 申请日期 1998.11.05
申请人 NEC CORPORATION 发明人 IWATA, NAOTAKA;NISHIMURA, TAKESHI B.
分类号 H01L27/04;H01L21/822;H01L27/06;(IPC1-7):H01L21/28;H01L27/01;H01L25/07;H01G4/10;H01L21/77 主分类号 H01L27/04
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