Micromachined devices with anti-levitation devices

摘要

A micromachined device has first and second sets of interdigitating fingers movable on a plane parallel to a substrate. A first group of conductive members is formed on the substrate and is at the same DC voltage as a first group of fingers. A second group of conductive members is formed on the substrate and is electrically coupled to the second group of fingers. The conductive members help to prevent one group of fingers from levitating with respect to others.