Method of preparing barrier rib master pattern for barrier rib transfer and method of forming barrier ribs

摘要

A method of preparing a barrier rib master pattern for barrier rib transfer, which includes the steps of forming a photosensitive material layer on a substrate performing oblique exposure by projecting exposure light onto the photosensitive material layer with the intervention of a photomask obliquely with respect to the substrate, and developing the photosensitive material layer, whereby a rib pattern having tapered side walls is formed on the substrate.