| 发明名称 |
System and method for classifying an anomaly |
| 摘要 |
A method and system for generating and managing a knowledgebase for use in identifying anomalies on a manufactured object, such as a semiconductor wafer, includes measures for adding, deleting, and organizing data from the knowledgebase.
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| 申请公布号 |
US6483938(B1) |
申请公布日期 |
2002.11.19 |
| 申请号 |
US20000519678 |
申请日期 |
2000.03.06 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
HENNESSEY A. KATHLEEN;LIN YOULING;REDDY RAJASEKAR;CLEAVELIN C. RINN;HASTINGS, II HOWARD V.;KINIKOGLU PINAR;WONG WAN S. |
| 分类号 |
G01N21/95;G01N21/956;G06T7/00;H01L21/66;(IPC1-7):G06K9/00 |
主分类号 |
G01N21/95 |
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