Apparatus for electroplating alloy films

摘要

An electroplating bath includes two electrolytes that are separated by a low ionic mobility barrier substance. Electroplating substrates can be transferred between the two electrolytes, through the barrier substance. Successive layers can be deposited by alternately electroplating in the two electrolytes. The substrate need not be brought through an air-liquid interface in transferring it between the two electrolytes. More than one anode can be provided in each electrolyte for depositing alloy film layers. A dummy electrode can be provided in each electrolyte to be used in lieu of the substrate in order to change concentrations of compounds in each electrolyte so that sharp compositional transitions between successive layers deposited on the substrate can be obtained.