| 摘要 |
PROBLEM TO BE SOLVED: To obtain a low-cost, high-sensitivity, and high-reliability inertia force sensor having high impact resistance. SOLUTION: This inertia force sensor is provided with a board, and a structure which is joined to the board, and is formed by etching a wafer made from single crystalline silicon. The structure is provided with a vibrating body provided with a mass body situated with a gap between as against the board, beams which support the mass body and are situated with gaps between as against the board, and anchors which support the beams and are joined to the board, and fixed electrodes put on the side surface of the mass body. The inertia force sensor detects the displacement of the movable electrode electrically using the mass body as a movable electrode, and is provided with an auxiliary supporting part arranged around the structure, and a protecting board arranged on the auxiliary supporting part for enclosing the structure. In the protecting board, grooves which make the mass body and the beams vibrate freely with the structure kept enclosed are formed, and in addition holes are formed only at portions facing metal electrodes formed on the anchor and the fixed electrodes individually. |
