PLASMA PROCESSING SYSTEM AND METHOD,申请号KR1020027009858-传众专利搜索

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发明名称	PLASMA PROCESSING SYSTEM AND METHOD
摘要
申请公布号	KR20020086487(A)	申请公布日期	2002.11.18
申请号	KR1020027009858	申请日期	2002.07.31
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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