PROBE CARD HAVING PROBES OF DIFFERENT SHAPES

摘要

PURPOSE: A probe card having probes of different shapes is provided to improve the recognition efficiency of probes in a state of high power a camera by forming differently shapes of probes of the probe card used in an EDS(Electrical Die Sorting) process for sorting bad states or good states of each chip of a wafer. CONSTITUTION: A probe card includes a printed circuit board and a plurality of probes fixed on the printed circuit board. The probes(240) of the probe card are contacted with each pad(220) of a chip(200). An end portion of a reference probe(240) is formed by a rectangular shape. Each end portion of the remaining probes(240) except for the reference probe(240) is formed by a circular shape. In addition, the end portion of the reference probe(240) can be formed by the circular shape if each end portion of the remaining probes(240) except the reference probe(240) is formed by the rectangular shape.