APPARATUS FOR PREVENTING CONTAMINATION OF DIFFUSION FURNACE

摘要

PURPOSE: A contamination prevention apparatus of a diffusion furnace is provided to prevent a powder formation and contamination in a tube by controlling the temperature of cooling water. CONSTITUTION: The apparatus includes a plurality of guard rings(50) formed in a manifold(60) in a diffusion furnace. A plurality of cooling water channels(61-66) are formed in the manifold(60) spaced apart from each other for supplying cooling water to the manifold(60). A plurality of control valves(67-69) controls the quantity of the cooling water. A plurality of sensing parts(71-73) measures the temperature of the cooling water. A control part(80) determines the temperature of the cooling water by using reference data according to the measured temperature, and controls the control valves(67-69) for the determined temperature.