发明名称 Process for producing semiconductor devices and semiconductor device per se
摘要 <p>The invention relates to a semiconductor component and a method for the production thereof which makes it possible to obtain a switching element for a high-frequency switching without the constantly present leakage inductances leading to spurious interference voltage peaks. To that effect, the surface of the wafer is provided with trenches leading to a central zone (10) which has a laterally variable thickness. Thicker regions (40) of the central zone (10) guarantee a smooth drop in evacuation current, while the thinner regions (50) ensure short switching times and a low forward voltage.</p>
申请公布号 CZ20020803(A3) 申请公布日期 2002.11.13
申请号 CZ20020000803 申请日期 2000.08.26
申请人 ROBERT BOSCH GMBH 发明人 SPITZ RICHARD
分类号 H01L21/329;H01L29/861;(IPC1-7):H01L29/861 主分类号 H01L21/329
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