| 摘要 |
<p>To provide a vertical type wafer supporting jig in which a ring-like support plate can be fixed to support pillars by a simple structure without adopting conventional welding means as fixing means and the ring-like support plate can be surely prevented from falling off, and which can rapidly cope with a demand for repair. Means for Solving the Problems A vertical type wafer supporting jig for mounting many wafers onto many support plates stacked and fixed in a vertical direction to plural support pillars with a predetermined wafer mounting interval being provided, wherein support groove parts for inserting and supporting the support plates are respectively formed in the vertical direction of the support pillars with a predetermined interval being provided, a fixing rod is provided adjoining at least one of the support pillars, at least one receiving groove corresponding to the fixing rod is provided in a peripheral part of the support plate, and the support plate is fixed to and supported by the support pillars by means of causing the support plate to be inserted into and supported by the support groove part and causing the fixing rod to be fitted to the receiving groove of the support plate. <IMAGE></p> |
