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发明名称
ELECTRIC DISCHARGE LASER WITH ACOUSTIC CHIRP CORRECTION
摘要
申请公布号
EP1256149(A1)
申请公布日期
2002.11.13
申请号
EP20010901827
申请日期
2001.01.05
申请人
CYMER, INC.
发明人
PARTLO, WILLIAM, N.;FOMENKOV, IGOR, V.;HUEBER, JEAN-MARC;BOR, ZSOLT;ONKELS, ECHEARD, D.;CATES, MICHAEL, C.;UJAZDOWSKI, RICHARD, C.;FLEUROV, VLADIMIR, B.;GAIDARENKO, DMITRI, V.
分类号
H01S3/03;G03F7/20;H01S3/036;H01S3/038;(IPC1-7):H01S3/036;H01S3/22;H01S3/223;H01S3/04
主分类号
H01S3/03
代理机构
代理人
主权项
地址
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