发明名称 Multiple bath electrodeposition
摘要 <p>A method and apparatus for fabrication of thin multilayers, multilayered nanowires, and nanocomposites, with the purpose to complete the actually developing nanotechnologies, are described. A closed electrochemical system with multiple baths, protected by inert gas, where the chemical solutions are transferred there and back between different chemical tanks and an electrochemical cell, are used to produce thin, in nanometer-range, multiple layer depositions on a substrate which stays on a fix position for all the deposition cycles inside the electrochemical cell. A special transfer method protect the system from the cross contamination between different chemical solutions, and a particular way of cleaning, protect the deposited layers from the undesirable surface reactions. &lt;IMAGE&gt;</p>
申请公布号 EP1256639(A1) 申请公布日期 2002.11.13
申请号 EP20010111055 申请日期 2001.05.08
申请人 UNIVERSITE CATHOLIQUE DE LOUVAIN 发明人 MATEFI-TEMPFLI, STEFAN;PIRAUX, LUC
分类号 C25D5/10;C25D17/00;(IPC1-7):C25D5/10 主分类号 C25D5/10
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