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发明名称
CMOS semiconductor device and manufacturing method thereof
摘要
申请公布号
EP0696062(B1)
申请公布日期
2002.11.13
申请号
EP19950304434
申请日期
1995.06.23
申请人
HITACHI, LTD.
发明人
KAWAGOE, HIROTO;SHIRASU, TATSUMI;KIYOTA, SHOGO;SUZUKI, NORIO;YAMADA, EIICHI;SUGINO, YUJI;KITANO, MANABU;SAKURAI, YOSHIHIKO;NAGANUMA, TAKASHI;ARAKAWA, HISASHI
分类号
H01L29/78;H01L21/205;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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