| 摘要 |
The present invention provides a method for landing pads in the semiconductor devices, comprising the following steps: providing a semiconductor substrates with a plurality of active regions, a plurality of gate structures above the active regions and a plurality of source/drain regions, while each gate structure comprises a top cap layer and sidewall spacers; forming a conductive layer over the substrate; removing a portion of the conductive layer above the gate structure using the top cap layer of the gate structure as a stop layer, so that a height of the conductive layer is lower than a height of the gate structure; forming a patterned mask layer, right above the active regions, over the substrate; performing an etching step to define the conductive layer above the active regions; and removing the patterned mask layer and forming landing pads on the active regions.
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