| 摘要 |
An electrode arrangement for a gas laser is provided. The electrode arrangement includes an elongated high voltage electrode, an elongated ground electrode disposed adjacent to the high voltage electrode, a discharge gap between the two electrodes an insulator element, a high voltage conductor having a first end connected to the high voltage electrode and extending through the insulator element, and a shadow plate interposed between the discharge gap and the insulator element. The electrode arrangement may be employed in a variety of gas lasers, including excimer lasers.
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