| 摘要 |
The present invention discloses an ion beam gun wherein the ions are produce d by radio-frequency excitation. A plasma is created in a vessel (100), or chamber, by ionizing gas molecules by means of a coil (230) about the outside of the vessel. The coil (230) receives radio-frequency energy which ionizes the gas molecules. The inside of the vessel contains an anode (242, 244) and resonator (250) to assist in shaping and containing the plasma. The resonato r (250) acts as an internal electrode to produce eddy currents generated by the radio-frequency energy to enhance the plasma. A multi-apertured screen grid (260) also helps contain and shape the plasma within the chamber while a multi-apertured accelerator grid (262) is used to extract the ions from the ion beam gun.
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