| 摘要 |
An interferometric testing system for testing an optical system includes an interferometer which outputs a light beam and analyzes the returned light beam, and a multiple plane reference mirror which reflects the light beam corresponding to the image point transmitted by the optical system back through the optical system to thereby generate the interference. According to one aspect of the invention, the multiple plane reference mirror reflects the light beam back along the arrival path of the light beam. According to another aspect of the invention, the multiple plane reference mirror comprises a holographic multiple plane reference mirror. The interferometric testing method is also described.
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