| 摘要 |
This invention describes two new methods to form copper alloy films. In the first embodiment of this invention physical vapor deposition (PVD) or sputtering of a copper alloy film, is then followed by a chemical vapor deposition (CVD) or electro-chemical deposition (ECD) of a layer of pure copper. In the second embodiment of this invention chemical vapor deposition (CVD) or electro-chemical deposition (ECD) deposits a layer of pure copper, which is then followed by physical vapor deposition (PVD) or sputtering of a copper alloy film. In yet another embodiment to these methods, special, separate low temperature annealing steps follow said methods to enhance copper alloy formation. By the two deposition techniques briefly described above, high aspect ratio vias and trenches can be filled with copper corrosion and electromigration resistant alloys.
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