发明名称 CARRIER FOR POLISHING GLASS SUBSTRATE, AND GLASS SUBSTRATE POLISHING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a carrier for polishing a glass substrate, and a glass substrate polishing device, capable of restricting generation of flaws in an outer circumferential edge surface of a disc-shaped glass substrate in a process of lapping a main surface. SOLUTION: A double-side lapping machine 20 comprises the carrier 27 provided with holes 28 for containing a glass substrate workpiece 30. In this carrier 27, a rate of a radius R of the hole 28 to a radius r of the glass substrate workpiece 30, that is a value of R/r, is set to be 1.030 or more.
申请公布号 JP2002326156(A) 申请公布日期 2002.11.12
申请号 JP20010131567 申请日期 2001.04.27
申请人 NIPPON SHEET GLASS CO LTD 发明人 TAJIMA YOICHI
分类号 B24B7/24;B24B37/27;B24B37/28;G11B5/84 主分类号 B24B7/24
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