发明名称 |
Substrate holder system with substrate extension apparatus and associated method |
摘要 |
An apparatus and associated method that removes electrolyte solution from a substrate, the apparatus comprises a thrust plate and a substrate extension unit. The thrust plate at least partially defines a spin recess. The substrate extension unit can be displaced between a retracted position and an extended position relative to the spin recess. The substrate extension unit is disposed within the spin recess when positioned in the retracted position. The substrate extension unit at least partially extends from within the spin recess when positioned in the extended position. The substrate is processed by immersing at least a portion of the substrate in a wet solution. The substrate is removed from the wet solution. The substrate extension unit extends into its extended position, and the substrate is spun. Extending the substrate extension unit limits the formation of fluid traps within the substrate holder assembly or between the substrate and the substrate holder assembly.
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申请公布号 |
US6478937(B2) |
申请公布日期 |
2002.11.12 |
申请号 |
US20010765855 |
申请日期 |
2001.01.19 |
申请人 |
APPLIED MATERIAL, INC. |
发明人 |
OLGADO DONALD J. K.;LAKSHMIKANTHAN JAYANT |
分类号 |
C25D7/12;(IPC1-7):B23H7/26 |
主分类号 |
C25D7/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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