PRODUCING METHOD OF MICRO OPTICAL ELEMENT, MICRO OPTICAL ELEMENT BY THE PRODUCING METHOD, AND OPTICAL DEVICE USING THE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a producing method of a micro-optical element capable of suppressing the generation of drift of a ion beam due to steep change in charging and accurately machining a micro opening portion, in machining by a focusing ion beam (FIB machining), a micro optical element by the producing method, and an optical device using the element. SOLUTION: The producing method of the micro-optical element forming an opening portion less than light wavelength comprises a process preparing a conductive lightproof film, an insulating light transmission base element, and a workpiece inserted between the conductive lightproof film and the insulating light transmission base element having a conductive light transmission film; and a process forming irradiating a focusing ion beam to the workpiece and forming the opening portion less than light wavelength at a required position by etching all of the conductive lightproof film and a part of conductive light transmission film.