发明名称 OPTICAL CHARACTERISTIC MEASURING METHOD, APPARATUS THEREOF AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To accurately measure optical characteristics of an optical system under test. SOLUTION: The measuring method comprises steps 113, 114 for moving a spot image and a specified measuring region relatively, and measuring the quantity of a light arriving at a specified measuring region at every position of the relative movement; step 115 for obtaining a waveform showing the quantity change of the light arriving at the measuring region due to the position relation change of the spot image and the specified measuring region, based on the measurement result, and obtaining position information of the spot image, based on the obtained waveform; and step 116 for obtaining optical characteristics of an optical system under test, based on the obtained position information of the spot image.
申请公布号 JP2002324747(A) 申请公布日期 2002.11.08
申请号 JP20010128589 申请日期 2001.04.26
申请人 NIKON CORP 发明人 OTAKI KATSURA;TSUKAMOTO HIROYUKI
分类号 G01M11/02;G03F7/20;G03F7/22;G03F9/00;H01L21/027;(IPC1-7):H01L21/027 主分类号 G01M11/02
代理机构 代理人
主权项
地址