| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized and highly sensitive pressure detector capable of accurately detecting external pressure. SOLUTION: This package for the pressure detector is equipped with an insulating substrate 1 having a mount part 1b mounted with a semiconductor element 3, a plurality of wiring conductors 5 disposed on the insulating substrate 1 and electrically connected to electrodes of the semiconductor element 3, an insulating plate 2 joined in a flexible state to the insulating substrate 1 so as to form a closed space between the insulating plate and the other principal surface of the insulating substrate 1, a first electrode 7 for capacitance formation laid over the other principal surface of the insulating substrate 1 and electrically connected to one 5a of the wiring conductors 5, and a second electrode 8 for capacitance formation laid over the inside principal surface of the insulating plate 2 and electrically connected to the other one 5b of the wiring conductors 5. The wiring conductors 5a and 5b are disposed so as not to vertically overlap with the first and second electrodes 7 and 8. |
