| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for automatically inspecting a floating of joined parts generated in one base body when one base body such as an electronic part is connected to the other base body such as a substrate via a plurality of joining parts. SOLUTION: In this joined part inspecting method for joined parts set in one base body when one base body is joined to the other base body through a plurality of positions, it is characterized in that a plane defined by a combination of the joined parts is calculated as an imaginary ground plane on the basis of three-dimensional coordinate values of the respective joined parts in one base body. Then, it is determined whether other joined parts are protruded from this plane or not, and the imaginary ground plane from which no other joined part is protruded is selected. When a single imaginary ground plane is obtained, this is used as a ground plane. When a plurality of imaginary ground planes are obtained, a plane having an large area of an initial plane shape defined by a combination of the joined parts is used as the ground plane, and a clearance between this ground plane and other connection parts is calculated as a separation quantity.
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