| 摘要 |
PROBLEM TO BE SOLVED: To provide a refined developer solution producing apparatus and a method thereof which accurately and quickly produces a developer solution of a desired concentration at the use side and accurately controls the composition and the concentration of the developer solution. SOLUTION: The refined developer solution producing apparatus 100 comprises a preparation tank 105 to which an original developer solution and pure water are fed, and a leveling tank 108 connected thereto and to a processing equipment for forming electronic circuits through a pipeline 118. The preparing and leveling tanks 105, 108 have their respective alkali solution measuring means 106, 114. The feed rate, etc., of the original developer solution in the preparing tank 105 are adjusted, based on values measured by the alkali concentration measuring means 106. Thus, adjusted alkali developer solution is sent to the leveling tank I108 and then fed to the processing equipment through the pipeline 118 after leveling the alkali concentration. |
