ENHANCING SYSTEM FOR OPERATING RATE OF EQUIPMENT, MONITOR, SUPPLY APPARATUS FOR COMPONENT, ENHANCING METHOD FOR THE RATE, RECORDING MEDIUM AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide an enhancing system for operating rate, monitor, supply apparatus for component, enhancing method for the rate, recording medium and program capable of enhancing operating rates of manufacturing facilities of semiconductor equipment 10 and the like without reducing the rates and also performing such as maintenance and repairs. SOLUTION: In the system, semiconductor equipment 10 can monitor signs of failures or failures of the equipment 10 by bringing an attendant system 20 into management of the equipment 10. Accordingly, the maintenance can be performed in advance in a failure predicted state in which perfect suspension has not occurred yet and it is still possible to manufacture any number of the other equipment 10 is spite of the fact that the signs of failures of the equipment 10 have started to appear. Even in the event of failure, prompt repair can be performed. Moreover, by concentrating data of the equipment 10 to a database 16, the maintenance can be performed without increasing traffic of a host network 40 in amount unnecessarily.