METHOD AND APPARATUS FOR HIGH-PRESSURE PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide a processing method and a processor which eliminate the need for a seal member that becomes a source of dust and also eliminates the need to install a rotary driving source such as a motor for rotating a body to be processed, such as a semiconductor substrate in the processing chamber of a pressure container when the body to be processed is processed in the processing chamber by using high-pressure liquid. SOLUTION: In the processing chamber 2 of the processing container 1, the body 5 to be processed is floated by liquid and also rotated on the container axis by the liquid.