| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope equipped with an optical microscope and a function that has made the time required for bringing a probe closer to the surface of a measurement sample shorter. SOLUTION: This scanning probe microscope is equipped with the optical microscope under which the measurement sample and probe can be observed. The probe microscope is also provided with an image pickup element which fetches the image of the optical microscope as a digital image, a processor which can process the fetched image, and a driving mechanism which can change the focal position of the optical microscope. In addition, the probe microscope is also provided with a Z-stage mechanism which can change the interval between the probe and the surface of the sample.
|
