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发明名称
KAPAZITATIV GEKUPPELTER RF-REAKTOR FÜR DIE BESCHICHTUNG MIT DIAMANTARTIGEM KOHLENSTOFF
摘要
申请公布号
DE69624139(D1)
申请公布日期
2002.11.07
申请号
DE1996624139
申请日期
1996.11.18
申请人
E.I. DU PONT DE NEMOURS AND CO., WILMINGTON;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, OAKLAND
发明人
DEVLIN, JAMES;COATES, MAYO;ARCHULETA, ARTHUR;BARBERO, STEVEN
分类号
C23C16/26;C23C16/27;C23C16/50;C23C16/505;C23C16/54;D06M10/02;D06M10/06;D06M11/74;D06M101/36;(IPC1-7):D06M11/74
主分类号
C23C16/26
代理机构
代理人
主权项
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