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发明名称
SOI-Halbleitervorrichtung und Verfahren zu dessen Herstellung
摘要
申请公布号
DE69430881(T2)
申请公布日期
2002.11.07
申请号
DE19946030881T
申请日期
1994.03.17
申请人
CANON K.K., TOKIO/TOKYO
发明人
TSUDA, HISANORI;KOIZUMI, TORU;WATANABE, HIDENORI
分类号
H01L21/331;H01L21/84;H01L27/06;H01L27/12;H01L29/732;H01L29/739;(IPC1-7):H01L29/73
主分类号
H01L21/331
代理机构
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